Single etch grating couplers for mass fabrication with DUV lithography

R. Halir, L. Zavargo-Peche, D. -X. Xu, P. Cheben, R. Ma, J. H. Schmid, S. Janz, A. Densmore, A. Ortega-Moñux, I. Molina-Fernández, M. Fournier, J. -M. Fédeli
January 2012
Cite DOI
Publication
Optical and Quantum Electronics, vol. 44, pp. 521–526

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